Courses:

Course Info

• Course Number / Code:
• 6.78 (Spring 2003) 
• Course Title:
• Semiconductor Manufacturing 
• Course Level:
• Graduate 
• Offered by :
• Massachusetts Institute of Technology (MIT)
  Massachusetts, United States  
• Department:
• Electrical Engineering and Computer Science 
• Course Instructor(s):
• Prof. Duane Boning 
• Course Introduction:
•  
• 
  
  6.780 Semiconductor Manufacturing
  
  
  
  

  Spring 2003

  
  
  

  
  
  

  Course Highlights

  
  
  

  This course site features lecture notes and student final papers. Some lectures in this class are also offered though the MIT Singapore Alliance.

  
  
  

  Course Description

  
  
  

  6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.