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Electron Microprobe Analysis by Wavelength Dispersive X-ray Spectrometry >> Content Detail



Syllabus



Syllabus



Course Description


The electron microprobe provides a complete micron-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam, incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis by wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and different imaging techniques including scanning backscattered electron (BE), scanning secondary electron (SE), scanning X-ray (by WDS or EDS, also known as compositional or elemental maps), and scanning cathodoluminescence (CL) imaging. Lab sessions involve hands-on use of the JEOL JXA-733 Superprobe.



Syllabus




Theory of X-ray Spectrometry


  • Electron-specimen Interactions
    • Elastic Scattering: Electron Backscattering
    • Inelastic Scattering: Secondary Electron Excitation
      • Continuum X-ray Generation, Characteristic X-ray Generation
    • Interaction Volume
  • Matrix Corrections
    • Atomic Number, Absorption and Characteristic Fluorescence Corrections
    • Continuum Fluorescence Correction
    • Φ(ρz) Corrections


Instrumentation


  • Detectors used in the Electron Microprobe
    • Electron Detectors: Everhart-Thornley and Solid-state Diode Detectors
    • Cathodolumenescence Detectors
    • X-ray Detectors: Energy Dispersive and Wavelength Dispersive Spectrometers


Imaging Techniques


  • Topographic Imaging
  • Compositional Imaging with Wavelength Dispersive Spectrometry
  • Cathodoluminescence Imaging


Quantitative Analysis


  • Wavelength and Energy Dispersive Techniques
  • Background and Peak Overlap Corrections
  • Light Element Analysis


Recommended Textbook


Goldstein, J. I., D. E. Newbury, P. Echlin, D. C. Joy, A. D. Romig Jr., C. E., Lyman, C. Fiori, and E. Lifshin. Scanning Electron Microscopy and X-ray Microanalysis: A Text for Biologists, Material Scientists, and Geologists. 2nd ed. New York, NY: Plenum Press, 1992.



Other Books


Reed, S. J. B. Electron Microprobe Analysis and Scanning Electron Microscopy in Geology. Cambridge, UK: Cambridge Univ. Press, 1996.

Scott, V. D., G. Love, and S. J. B. Reed. Quantitative Electron-Probe Microanalysis. 2nd ed. New York, NY: Ellis-Horwood, 1995.



Grading


The basis for the grade is completion of all the lab exercises (problem sets) and correctly solving problem 3B.


 








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