| LEC # | TOPICS | LABS | KEY DATES |
|---|---|---|---|
| 1 | Overview/Safety/Lab Assignment (MAS) CIM: Introduction to CIM (SR) | Homework 1 out | |
| 2 | IC Lab - Overview (MAS) | IC-1: Gate Oxide/Poly | |
| 3 | Oxidation (MAS) | Homework 1 due Homework 2 out | |
| IC-2: Backside Etch | |||
| 4 | Diffusion (RCOH) | Homework 2 due Homework 3 out | |
| 5 | IC Lab: Testing (MAS) CIM: Writing Technical Reports (SR) | IC-3: Test | IC lab report out |
| 6 | Diffusion/Implantation (RCOH) | ||
| 7 | MEMS Lab: Overview (MAS) | MEMS-1: Photolith | Homework 3 due IC lab report due (in lab) |
| 8 | Vacuum System (RCOH) | Homework 4 out | |
| 9 | CVD (RCOH) | ||
| 10 | Sputtering (RCOH) CIM: Feedback on IC Report, Reports Returned (SR) | MEMS-2: KOH Etch | Homework 4 due Homework 5 out |
| Quiz 1: Through CVD (Staff) | |||
| 11 | Fluids Lab: Overview (MAS) | Fluids-1: Photolith | |
| 12 | Evaporation (RCOH) | Revised IC report due | |
| 13 | MEMS Lab: Testing (MAS) | MEMS-3: Test | Homework 5 due MEMS lab report out |
| 14 | Lithography (MAS) | Homework 6 out Revised IC report returned | |
| 15 | Lithography, Soft Lithography (MAS) | ||
| 16 | Etching (Wet) (RCOH) | Homework 6 due Homework 7 out | |
| 17 | Etching (Dry) (RCOH) | Fluids-2: Molding | MEMS lab report due |
| 18 | CMOS (MAS) | Homework 7 due Homework 8 out | |
| 19 | Advanced Silicon Devices (MAS) | ||
| 20 | Fluids Lab: Testing (MAS) | Homework 8 due Take home exam out | |
| 21 | Take Home Introduction / Patents (MAS) | Fluids-3: Test | Fluids lab report out |
| Quiz 2: Through Advanced Silicon Devices (Staff) | |||
| 22 | Take Home Discussion (MAS) | ||
| 23 | Advanced Topics (Guest) | Fluids lab report due | |
| 24 | Advanced Topics (cont.) (Guest) | ||
| 25 | Analog Devices Fab Tour | Take home quiz due |